Throughput : >1440 wafer/hr
Wafer type : Modular is easy changeover for 125x125/156x156 mono/poly
Input/Ouput system :
Boat to Carrier
Carrier to Boat
Handling Device : Precision, servo and stepper motordriven tray and cassette input and output for reliable operation |
| Windows XP based system software
Graphical user interface with user friendly prompts.
The position status of the wafers and carriers are on line displayed
Color flat panel
Keyboard and 3-button trackball |
Dimensions : 3800(W) x2500(D)x2800(H)mm
System Power : 220VAC±10%, 50/60Hz,25Amps, single phase
Temperature :5℃ (41℉) to 60℃(140℉)
Humidity : 10% to 60% noncondensing
Compressed Air : 0.5~0.7MPa
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